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SEKCE 3 - ABSTRAKTY
PLASMA POLYMERS MODIFICATION BY ATMOSPHERIC CORONA DISCHARGE
Luděk Aubrecht
Czech Technical University in Prague
Faculty of Electrical Engineering
Telephone: 00-420-2-2435 2324, Fax: 00-420-2-24352331
e-mail:aubrecht@fel.cvut.cz
Abstract
This paper deals with phenomena observed during the study of plasma deposition and modification of polymer surfaces – effects of corona discharge treatment on polymer surfaces and the influence of these treatments on the physical properties of these surfaces. The state of the art of this new technology is discussed. The various surface modification plasma technologies are also discussed.
CALCULATION OF RADIATIVE HEAT TRANSFER IN ARGON ARC PLASMAS
Vladimír Aubrecht
Brno University of Technology,
Department of Power Electrical and Electronic Engineering,
Technická 8, 616 00 Brno
Institute of Termomechanics Czech Academy of Science,
Dolejskova 5, 182 00 Praha 8
e-mail: aubrecht@uvee.fee.vutbr.cz
Abstract
Radiative heat transfer is a significant energy exchange process in arc plasmas. In the paper, an approximate “Method of partial characteristics (MPC)” is used to evaluate radiation intensities, radiation fluxes and divergence of radiation fluxes in argon arc plasmas of cylindrical symmetries at various plasma temperature profiles.
TO THE CALCULATION OF KINETIC COMPOSITION OF SF6-ARC PLASMA
Milada Bartlová, Oldřich
Coufal*
UFYZ FEI VUT, Technická 8,
616 00 Brno, e-mail:bartlova@dphys.fee.vutbr.cz
*UEEN FEI VUT, Purkyňova 113, 612 00 Brno, coufal@ueen.fee.vutbr.cz
Abstract
In this paper we compare the kinetic composition of the SF6 system during the extinction process in the switching arc computed on the basis of three different kinetic models. They differ in choice of the system of chemical reactions and in values of reaction rate constants.
NEW PRINCIPLE FOR DIGITAL ACQUISITION OF MICRODISCHARGE PULSES
Tomáš Ficker, Jiří Macur, Stanislav Filip, Milan Kliment
Faculty of Civil Engineering
Physics Department
Tel.: 00-420-5-4114 7661, Fax: 00-420-5-4114 7666
e-mail: fyfic@fce.vutbr.cz
Abstract
Deterioration effects of microdischarges upon the insulation of high voltage components have been known for many decades. One of the frequently used methods of monitoring the microdischarges is the digital acquisition of their electrical pulses and the determination of the corresponding height statistics. A new concept of the measurement of the height of microdischarge pulses is proposed and implemented on a special hardware assembly.
STATISTICS OF ELECTRON AVALANCHES IN THEIR PRE-STREAMER STAGE
Tomáš Ficker
Faculty of Civil Engineering
Žižkova 17, 662 37 Brno, Czech Republic
Tel.: 00-420-5-4114 7661, Fax: 00-420-5-4114 7666
E-mail: fyfic@fce.vutbr.cz
Abstract
Partial microdischarges often occur in random microscopic voids or imperfections inside many organic insulation materials and cause limitation of the service time of many high voltage components. The presented paper discusses statistical features of microdischarge avalanches in their pre-streamer stage when the space charge in avalanches starts to reduce the process of collision ionisation. The discussion is based on the experimental data recorded by a specially designed and constructed digitiser described in a separate conference contribution.
ZÁKLADNÍ VLASTNOSTI PLAZMATU A JEHO APLIKACE
Boleslav Gross
Abstract
Referát obsahuje fenomenologický popis základních vlastností plazmatu a možností jeho vzniku ve vesmíru i v laboratoři. Je uveden stručný historický přehled jeho poznávání a krátce jsou probrány nejčastější aplikace.
TEMPERATURE FIELD IN PLASMA GENERATOR WITH INTENSIVELY COOLED ELECTRIC ARC
Jaroslav Heinz
Department
of Electrical Power Engineering FEECS BUT
Purkyňova 118, 612 00 Brno, Czech
Republic
phone: +420 5 41146082, e-mail:heinz@ueen.fee.vutbr.cz
Abstract
This contribution presents simplified mathematical-physical model of processes in anode channel of plasma generator with aim to evaluate energy flows and output parameters as functions of generator’s main parameters (current or input power, gas flow, geometrical configuration, etc.).
ŘÍZENÁ TERMONUKLEÁRNÍ FÚZE V ROCE 2001
Pavel Kubeš
České vysoké učení
technické
Ffakulta
elektrotechnická
Katedra fyziky
Technická 2, 166 27 Praha 6, Česká republika,
Telefon: 2-24352330,
Fax: 2-24352331
Abstract
In plasma physics the problem of controlled fusion is solved very intensive. It is not only physical, bat also economical and technical problem. In this presentation mainly the physical aspect is discussed. There are a few ideas in controlled fusion realization, high temperature high density short living plasma (power lasers, z-pinches), high temperature, low density long living plasma (tokamaks, stelarators, helical systems) and high density, low temperature and high magnetic field compressing du to detonation wave. The new projects ITER, NIF, X-1 and Bayikal are presented.
GC MS CHARACTERISATION OF PLASMA ENHANCED POLYMERISATION
Ivo Kuřitka*, Norbert Dokoupil*, Jiří Pryček**, František Schauer*
Chemická fakulta
*Ústav fyzikální a spotřební chemie, ** Ústav
chemie a technologie ochrany životního prostředí
Telefon:
00-420-5-4114 9396, Fax: 00-420-5-4114
3133
e-mail:kuritka@fch.vutbr.cz
Abstract
The presented work deals with the characterisation of RF and MW plasma enhanced CVD processes used for the unconventional preparation of polysilylenes, to obtain materials with new electronic properties. The cryogenic apparatus was used to collecting samples. Obtained samples were analysed by a gas chromatograph in connection with the mass spectrometer to identify species occurring in plasma discharge during the deposition process.
VLIV PARAMETRŮ PLAZMATU NA VLASTNOSTI SAMOMAZNÝCH POVLAKŮ NAPRAŠOVANÝCH NEVYVÁŽENÝM MAGNETRONEM
Rudolf Novák, Tomáš Polcar, Tomáš Kubart, Danuše Nováková*
České vysoké učení technické v Praze, Fakulta strojní
Ústav fyziky
Technická 4, 166 07 Praha 6, Česká republika
Telefon :_00-420-2-24352431, Fax : 00-420-2-24352439
e-mail : novakr@fsid.cvut.cz
*České vysoké učení
technické v Praze, Fakulta dopravní
Katedra aplikované matematiky
Na Florenci 25, Praha 1
Telefon : 00-420-2-24890706, Fax : 00-420-2-24890702
e-mail : novakova@fd.cvut.cz
Abstract
The tribological properties of magnetron sputtered selflubricating coatings MoS2 depend strongly on the structure and morphology. They could be strongly influenced by ion bombardment with ions. In unbalanced magnetrons part of plasma impinges on subtrate surface and that is the reason, why the plasma parameters are of more importance in comparison with sputtering with normal magnetrons.
EVALUATION OF THE INTERFERENCE FRINGE CONTOURS OR PROFILE BY REDUCING THEM TO THE EQUIDENSE
Jan Píchal
Department
of Physics
e-mail: pichal@fel.cvut.cz
Abstract
The contribution describes a method of the interference fringe contours or profile evaluation by reducing them to a equidense – locus of points of the highest optical density using the Sabattier effect. Described method general profit lies in substantial speeding of the maximum blackening lines or contours location and their coordinates determination in the field under study.
CHARACTERIZATION OF PULSED DC MAGNETRON DISCHARGES FOR HIGH-RATE SPUTTERING
J. Vlček, P. Bělský, A. Pajdarů , M. Kormunda, J. Leština and J. Musil
Department of Physics, University of West Bohemia,
Univerzitní 22, 306 14 Plzeň, Czech Republic
Abstract
In several recent years, a great attention has been devoted to a reactive pulsed-dc magnetron sputtering. The main aim of this effort is to master a reproducible formation of insulating, e.g. oxide, films with a high deposition rate. Pulsed dc magnetron sputtering has a great potential also for many other applications. Its main advantage is that the target power loading in a pulse can be considerably higher than the maximum target power loading in dc sputtering (limited by target heating). This makes it possible to form films under new physical conditions, particularly (i) at higher deposition rates, (ii) at highly ionized fluxes of sputtered particles, and (iii) at simultaneous sputtering and evaporation from a partially molten target.
The article characterizes pulsed dc magnetron sputtering in a wide range of experimental conditions. The depositions were performed in a standard stainless steel vacuum chamber using an unbalanced planar circular magnetron operated with a Cu target, 100 mm in diameter. The substrate-to-target distance was 100 mm. The sputtering process was primarily controlled by the repetition frequency of pulses, fr, (1 - 50 kHz), the length of the voltage pulse, t1, (10 - 200 ms) with the t1/T ratio, where T = 1/fr, in the range from 0.2 to 0.9, the argon pressure, pAr, (0.1 - 5 Pa) and the average pulse current, Ida, (2 – 60 A). The maximum pulse voltage and maximum pulse current of the used computer-controlled (see calculation of the Ida values) pulsed power supply were 1000 V and 120 A, respectively. The deposition rate of Cu films was higher than 2 mm/min at maximum average target power loading in a pulse Pda = 680 W/cm2.
The discharge current-voltage characteristics, i.e. dependences of the magnetron voltage Ud on pre-set values of Ida, were measured to explain the obtained dependences for the deposition rate of Cu films. Time-resolved optical emission spectroscopy was used to study formation of high density metal plasma in front of the sputtered Cu target. Time-resolved mass spectrometry with energy resolution was carried out near the substrate to characterize occurrence of the Cu+ and Ar+ ions and their kinetic energies.
Diagnostics and optimization of ion source parameters
Stanislav Voborný, Jakub Zlámal, Petr Bábor, Stanislav Průša, and Tomáš Šikola
Institute of
Physical Engineering, Faculty of Mechanical Engineering, Brno University of
Technology, Technická 2, Brno 616 69 e-mail: vobor@fyzika.fme.vutbr.cz
Abstract
This contribution deals with diagnostics and consequent optimization of plasmatic ion source. Ion beam current density and ion current loss measurements are determined with the attempt of improving ion beam transportation characteristics.
Měření teploty plazmatu elektrického oblouku
Vladimír Zdražil, *Ladislav Peška, *Boleslav Gross
Vysoké učení technické v Brně
Fakulta elektrotechniky a informatiky
Ústav fyziky
Technická 8, 616 00 Brno, Česká republika
Telefon: 00-420-5-4114 3208, Fax: 00-420-5-4114
3133
e-mail: zdrazil@dphys.fee.vutbr.cz
*Ústav
výkonové elektrotechniky a elektroniky, FEI VUT, Technická 8, Brno
Abstract
One on the methods for determination of the plasma temperature is the method based on the self-reversal. This method requires the measurement of the radiation intensity emitted from the peaks surrounding the self/reversal minimum. The method has so far been applied for non-homogeneous plasma in a stationary state, but has not yet been applied onto the plasma of an electric arc fed by alternating current.
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Upraveno 24.10.2001 JiMa